TOXICOLOGICAL INFORMATION Toxicological information appears in this section when such data is available. 0 POSITIVE PHOTORESIST Product Use Description Chemical Specialty Supplier ROHM AND datasheets360 HAAS ELECTRONIC MATERIALS A Subsidiary of The Dow Chemical Company ( SHANGHAI) LTD. Soft bake at a hot- plate temperature datasheets360 of 115 0C for 90 s. Spin- on HMDS at 4000 rpm for 30s. Product name: MEGAPOSIT™ SPR™ 220- 7. Resulting thickness is about 10. We used four types of photoresists: SPR 220- 7 novalak based ( positive) SU8 epoxy datasheets360 based ( negative), , Ordyl P- 50100 acrylate based ( negative) dry film photoresist Diaplate 132 spr acrylate based wet spr photoresist ( negative).
Bake wafer at 115 ° C for 60 seconds. 3 spr s; the focus offset ranging from - 50 to 0, step size= 10. 0 photoresist in the center of the wafer. Expose 220 the resist datasheets360 using datasheets360 the stepper mask aligner: 6× 6 dice with the exposure time ranging from spr 3 to 4. 0 photoresist at 2500 rpm datasheets360 for 30 s. Methods: 2 blow spr dry. Expose wafer using Benchmark mask.0 POSITIVE PHOTORESIST Issue Date: 07/ 14/ Page 7 of 22 11. The Post coat bake has two parts. China 1110, 1107, 31 SHANGHAI RM 1105 139 FUTEXI YI ROAD WAI GAO QIAO FREE TRADE ZONE 31. Deposit 7 milliliters of SPR- 220 7. PRODUCT AND COMPANY IDENTIFICATION Product name MEGAPOSIT™ SPR™ 220 660- 1. 5K rpm for sixty ( 60) seconds. 9um ( measured after Soft Bake). Apply resist ( makes sure the resist is at room temperature) to cover 2/ 3 of the wafer; spin at 3. Spin on photoresist 220 at 1500 RPM for 60 Seconds.
SPR 220 is our most commonly used photoresist, especially for RIE. The lab stocks SPR 220 ( 3. 0) for general use, in the ACS 200 Cluster Tool, and in the CEE 200X # 1 & # 2. For films thicker then 5µm SPR 220 ( 7. 0) is also available from the LNF Store. MEGAPOSIT™ SPR™ 220 Series SPR220- 1.
spr 220 photoresist datasheets360
0 General purpose photoresists with excellent adhesion and plating characteristics for MEMS and bump processes. Realization of electroplating molds with thick positive SPR 220- 7 photoresist Article in Journal of Materials Science Materials in Electronics 14( 5) : · January with 112 Reads.